Crossing Automation - Spartan™ Products
The Spartan platform revolutionizes wafer sorting and equipment front-end (EFEM) wafer handling through its high performance capabilities and the simplicity of its design. The Spartan platform was envisioned from the outset as a unified atmospheric wafer handling solution, so it does not suffer from the component integration issues and related cost and complexity associated with traditional sorters and EFEMs, but instead offers the minimum scale and complexity necessary to move wafers as cleanly and as quickly as possible.
As a result, the Spartan platform offers the industry's highest reliability and serviceability, enabling it to provide the lowest cost-of-ownership of any comparable system available in the marketplace. It offers improved reliability and maximum efficiency, while delivering industry-leading cleanliness with the lowest particle levels. In addition, the Spartan provides precise, high-speed wafer swaps to improve throughput and mitigate the risk of wafer damage. Its optimized mini-environment offers better than ISO Class 1 performance, and in an EFEM application, its SMART-Plus™ software provides a single, consistent interface to the front-end.