Crossing Automation - ExpressConnect™ Components
ExpressConnect offers flexibility; flexibility that allows you to design optimized wafer-level vacuum automation for your process. ExpressConnect is a suite of five building blocks that are combined to generate unlimited configurations for wafer automation. The system architecture uses simple linear transfer devices and simplified control algorithms to improve efficiencies and control reliability.
The five components include:
Shuttle-Lock™
The core component of ExpressConnect, it performs all wafer transfer functions.
SEC-1000 Equipment Controller
A powerful, easily configured control device that is paired with all modules.
Load-Lock
The entrance and/or exit point(s) in most vacuum-based systems.
Multi Wafer Buffer
A four wafer transfer module that serves as the branch point in linear system configurations.
Trans-Center™
A six-to-nine wafer load-lock module that offers a radial cluster tool approach to wafer automation.